Porous Ceramic

LONGYI started the development of Porous Ceramic Chuck, Disco dicing chuck, wafer dicing chuck table, wafer dicing stage and floating stage in 2013. Its main customers are semiconductors, solar energy and LCD.

DISCO Dicing Chuck

For porous ceramics, the microstructure is made up of small crystals called grains. In general, the smaller the grain size, the stronger and denser is the ceramic material. The wide variety of applications for porous ceramic materials results from their unique properties. In many respects, these properties cannot be achieved by other materials.

Application:

  1. Vacuum Nozzle
  2. Vacuum Chuck
  3. Air Bearing
  4. Work Holding
  5. Air floating stage

III. Properties

LONGYI started the development of Porous Ceramic Chuck, Disco dicing chuck, wafer dicing chuck table, wafer dicing stage and floating stage in 2013. Its main customers are semiconductors, solar energy and LCD.

Item   /  No.

A-2000

B-2000

C-2000

D-2000

                   Material

Alumina

Al2O3

%

96

92

96

95

Bulk Specific gravity

g/cm3

2.28

2.28

2.28

2.1

Water absorption

%

0

0

0

0

Porosity

%

35~40

35~40

32~40

40~50

Pore size

μm

 2~3

2~3

2~3

30~40

Bending Strength

MPa

>60

>60

>60

>40

 

kgf/cm2

>6

>6

>6

>4

Color

 

White

Black

Brown

Black

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