LONGYI’s porous ceramics are based on high-quality raw materials of alumina and silicon carbide. For porous ceramics, the microstructure is made up of small crystals called grains. In general, the smaller the grain size, the stronger and denser is the ceramic material. The wide variety of application for porous ceramic materials results from their unique properties. In many aspects, these properties cannot be achieved by other materials.

Unlike traditional ceramics, precision ceramics uses refined high-purity inorganic materials as raw materials, chemically formulated and physically controlled to form billets, and then molded by mold and high-temperature sintering to achieve microstructure, chemical properties and physical properties. And finally processed into a variety of different performance products.

Dicing chuck table basic porous structure
Basic porous structure
Precision ceramics have five characteristics-Dicing chuck table
Corrosion resistance
Most ceramics have antioxidant and chemical resistance.
Wear resistance
The wear resistance of precision ceramics is well known. However, it is fragile.
Light weight
Most ceramics are lighter than metal and can even reach 40% of metal, because light weight can reduce the mechanical burden and save energy.
Low friction coefficient
Due to the low friction coefficient, high compressive strength and wear resistance of precision ceramics, some precision ceramics used for shaft seals, bearing, etc. are not required for lubrication.
High temperature resistance
There are few other materials that can withstand the high temperature as the ceramic materials. Some precision ceramics can withstand temperature up to 1400 ° C, but the most heat-resistant superalloys are rarely used at temperatures above 1100 ° C.
Dicing chuck table material property analysis
Various characteristics
Stainless steel base U-slot design
1.High temperature resistance 2.High toughness 3.Corrosion resistance 4.Groove design to increase the adsorption force of porous ceramics
Dicing chuck table stainless steel base inspection certificate
Stainless steel base inspection certificate


This series of antistatic surface treatments is specially developed for the wafer semiconductor industry to reduce the damage caused by static electricity during wafer manufacturing package testing, such as metal, ceramics, plastic (excluding Teflon and tantalum rubber). , quartz, etc., the finished product has high anti-static, high anti-wear, high temperature and other characteristics.


This series of anti-adhesive surface treatment is specially developed for various types of porous suction cups, molds, placing platforms and various transfer heads in the process. Eslite has excellent anti-adhesion and anti-dust accumulation after surface treatment. Reduce the defect rate and fragmentation loss caused by adhesive in the process.

Dicing chuck table inspect flatness, appearance
Inspect flatness, appearance
Dicing chuck table porous ceramic bare chip test
Porous ceramic bare chip test
Dicing chuck table inspecte vacuum value
Inspecte vacuum value
Dicing chuck table strict technical introduction
Strict technical introduction

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